Inventor
ZHU JI
US38 patents
⚠️ This page may combine multiple inventors who share the name “ZHU JI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
11 patentsUS7294580B2Nov 13, 2007
Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition
LAM RES CORP29 citations92
US7913703B1Mar 29, 2011
Method and apparatus for uniformly applying a multi-phase cleaning solution to a substrate
LAM RES CORP6 citations73
US7597765B2Oct 6, 2009
Post etch wafer surface cleaning with liquid meniscus
LAM RES CORP7 citations73
US9570320B2Feb 14, 2017
Method to etch copper barrier film
LAM RES CORP3 citations72
US11488831B2Nov 1, 2022
Efficient cleaning and etching of high aspect ratio structures
LAM RES CORP3 citations71
US11469079B2Oct 11, 2022
Ultrahigh selective nitride etch to form FinFET devices
LAM RES CORP3 citations71
US7967019B2Jun 28, 2011
Method and apparatus for removing contaminants from substrate
LAM RES CORP2 citations62
US12040193B2Jul 16, 2024
Efficient cleaning and etching of high aspect ratio structures
LAM RES CORP0 citations60
US7758404B1Jul 20, 2010
Apparatus for cleaning edge of substrate and method for using the same
LAM RES CORP6 citations59
US12568781B2Mar 3, 2026
Selective silicon trim by thermal etching
LAM RES CORP0 citations58
US8726919B2May 20, 2014
Method and system for uniformly applying a multi-phase cleaning solution to a substrate
LAM RES CORP0 citations51
ZHU JI
6 patentsUS8227394B2Jul 24, 2012
Composition of a cleaning material for particle removal
ZHU JI12 citations83
US8486287B2Jul 16, 2013
Methods for fabrication of positional and compositionally controlled nanostructures on substrate
ZHU JI17 citations80
US8758522B2Jun 24, 2014
Method and apparatus for removing contaminants from substrate
ZHU JI1 citations61
US8105997B2Jan 31, 2012
Composition and application of a two-phase contaminant removal medium
ZHU JI1 citations61
US8601639B2Dec 10, 2013
Apparatus for application of two-phase contaminant removal medium
ZHU JI0 citations51
US8480809B2Jul 9, 2013
Methods for application of two-phase contaminant removal medium
ZHU JI0 citations51
PROMEGA CORP
5 patentsUS9551705B2Jan 24, 2017
Compositions and methods for capture of cellular targets of bioactive agents
PROMEGA CORP6 citations83
US11072812B2Jul 27, 2021
Substrates for covalent tethering of proteins to functional groups or solid surfaces
PROMEGA CORP3 citations72
US11072811B2Jul 27, 2021
Substrates for covalent tethering of proteins to functional groups or solid surfaces
PROMEGA CORP0 citations62
US12221648B2Feb 11, 2025
Substrates for covalent tethering of proteins to functional groups or solid surfaces
PROMEGA CORP0 citations61
US10976312B2Apr 13, 2021
Compositions and methods for capture of cellular targets of bioactive agents
PROMEGA CORP0 citations61
MUI DAVID S L
4 patentsUS8211846B2Jul 3, 2012
Materials for particle removal by single-phase and two-phase media
MUI DAVID S L3 citations59
US8084406B2Dec 27, 2011
Apparatus for particle removal by single-phase and two-phase media
MUI DAVID S L3 citations59
US8226775B2Jul 24, 2012
Methods for particle removal by single-phase and two-phase media
MUI DAVID S L0 citations48
US8314055B2Nov 20, 2012
Materials and systems for advanced substrate cleaning
MUI DAVID S L0 citations39