Inventor
KAWAGUCHI MARK
US15 patents
⚠️ This page may combine multiple inventors who share the name “KAWAGUCHI MARK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
8 patentsUS11488831B2Nov 1, 2022
Efficient cleaning and etching of high aspect ratio structures
LAM RES CORP3 citations71
US11469079B2Oct 11, 2022
Ultrahigh selective nitride etch to form FinFET devices
LAM RES CORP3 citations71
US12040193B2Jul 16, 2024
Efficient cleaning and etching of high aspect ratio structures
LAM RES CORP0 citations60
US12467147B2Nov 11, 2025
Vapor cleaning of substrate surfaces
LAM RES CORP0 citations59
US12347650B2Jul 1, 2025
Substrate processing system including dual ion filter for downstream plasma
LAM RES CORP0 citations59
US11967486B2Apr 23, 2024
Substrate processing system including dual ion filter for downstream plasma
LAM RES CORP0 citations59
US11065654B2Jul 20, 2021
In situ vapor deposition polymerization to form polymers as precursors to viscoelastic fluids for particle removal from substrates
LAM RES CORP0 citations58
US7849554B2Dec 14, 2010
Apparatus and system for cleaning substrate
LAM RES CORP0 citations50