Inventor
MUSSELWHITE Nathan
US7 patents
⚠️ This page may combine multiple inventors who share the name “MUSSELWHITE Nathan”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
6 patentsUS11488831B2Nov 1, 2022
Efficient cleaning and etching of high aspect ratio structures
LAM RES CORP3 citations71
US11062897B2Jul 13, 2021
Metal doped carbon based hard mask removal in semiconductor fabrication
LAM RES CORP4 citations67
US12040193B2Jul 16, 2024
Efficient cleaning and etching of high aspect ratio structures
LAM RES CORP0 citations60
US12467147B2Nov 11, 2025
Vapor cleaning of substrate surfaces
LAM RES CORP0 citations59
US12568781B2Mar 3, 2026
Selective silicon trim by thermal etching
LAM RES CORP0 citations58
US12080592B2Sep 3, 2024
Film stack simplification for high aspect ratio patterning and vertical scaling
LAM RES CORP0 citations46