Inventor

NAKASHIMA MUTSUO

JP70 patents

⚠️ This page may combine multiple inventors who share the name “NAKASHIMA MUTSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NAKASHIMA MUTSUO

SHINETSU CHEMICAL CO

Acid-decomposable ester compound suitable for use in resist material

Ester compounds, polymers, resist compositions and patterning process

High molecular weight silicone compound, chemically amplified positive resist composition and patterning method

High molecular weight silicone compounds resist compositions, and patterning method

Ester compounds, polymers, resist composition and patterning process

High molecular weight silicone compounds, resist compositions, and patterning method

Polymer, resist composition and patterning process

Polymer, resist composition and patterning process

Polymers, resist compositions and patterning process

Ester compounds, polymers, resist composition and patterning process

Ester compounds, polymers, resist compositions and patterning process

Metal oxide-containing film-forming composition, metal oxide-containing film, metal oxide-containing film-bearing substrate, and patterning method

Positive resist material and pattern formation method using the same

Polymers, resist compositions and patterning process

Polymer, resist composition and patterning process

Polymers, chemical amplification resist compositions and patterning process

Resist compositions and patterning process

Acetal compound, polymer, resist composition and patterning process

Ester compounds, polymers, resist compositions and patterning process

Ester compounds, polymers, resist compositions and patterning process

Cyclic acetal compound, polymer, resist composition and patterning process

Lactone compounds having alicyclic structure and their manufacturing method

Ester compounds having alicyclic structure and method for preparing same

Styrene derivatives

Silacyclohexanone compound and a method of preparing a silacyclohexane-type liquid crystal composition containing it

Silacyclohexane compound, a method of preparing it and a liquid crystal composition containing it

Silacyclohexane compound, a method of preparing it and a liquid crystal composition containing it

Process for preparing silacyclohexane compounds

Silacyclohexane carbaldehyde compounds and processes for preparing silacyclohexane-based liquid crystal compounds from the carbaldehyde compound

Silacyclohexane compound, a method of preparaing it and a liquid crystal composition containing it

Resist composition and patterning process using the same

Silsesquioxane compound mixture, method of making, resist composition, and patterning process

Polymer, resist composition and patterning process

Polymer, resist composition and patterning process

Polymers, resist materials, and pattern formation method

Polymer, resist composition and patterning process

Ester compounds, polymers, resist compositions and patterning process

Polymer, resist composition and patterning process

Ether, polymer, resist composition and patterning process

Ester compounds, polymers, resist compositions and patterning process

Acetal compound, polymer, resist composition and patterning response

Lactone compounds having alicyclic structure and their manufacturing method

Polymers, chemical amplification resist compositions and patterning process

Ester compounds having alicyclic structure and method for preparing same

Silacyclohexane compounds, preparation thereof, liquid crystal compositions comprising the same, and liquid crystal devices comprising the composition

Liquid crystal compositions comprising silacyclohexane compounds

Liquid crystal composition and a liquid crystal display element which contains it

Optically active silacyclohexane compounds, liquid crystal compositions comprising the same and liquid crystal display devices comprising the compositions

Silacyclohexane compound, a method of preparing it and a liquid crystal composition containing it

HATAKEYAMA JUN

Patterning process