Inventor
LIU YUNG-TSUN
TW17 patents
Patents
17 patentsUS9997417B2Jun 12, 2018
Semiconductor device structure with gate spacer having protruding bottom portion and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations82
US9502412B2Nov 22, 2016
Semiconductor device structure with gate spacer having protruding bottom portion and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations82
US10522422B2Dec 31, 2019
Semiconductor device structure with gate spacer having protruding bottom portion and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10446390B2Oct 15, 2019
System and method for dispensing liquid spin-on glass (SOG) onto semiconductor wafers
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US9761592B2Sep 12, 2017
Structure and formation method of semiconductor device with embedded capacitor
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations70
US12509773B2Dec 30, 2025
Semiconductor processing tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12084769B2Sep 10, 2024
Semiconductor processing tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11851761B2Dec 26, 2023
Semiconductor processing tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12325913B2Jun 10, 2025
Deflector for chamber cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12272549B2Apr 8, 2025
System for dispensing spin-on glass (SOG) and method of using
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11443939B2Sep 13, 2022
System and method for dispensing liquid spin-on glass (SOG) onto semiconductor wafers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12131962B2Oct 29, 2024
Semiconductor processing tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US12276024B2Apr 15, 2025
Device and methods for chemical vapor deposition
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10163730B2Dec 25, 2018
Semiconductor device structure with gate spacer having protruding bottom portion and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US9356104B2May 31, 2016
Structure and formation method of semiconductor device with gate stack
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10153285B2Dec 11, 2018
Formation method of semiconductor device with embedded capacitor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US9502527B2Nov 22, 2016
Semiconductor device structure having multi-layered insulating cap layers over metal gate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations40