Inventor

LEE CHIH-TSUNG

TW41 patents

⚠️ This page may combine multiple inventors who share the name “LEE CHIH-TSUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEE CHIH-TSUNG

TAIWAN SEMICONDUCTOR MFG CO LTD

Polishing system

Polishing system and polishing method

Device and method for manufacturing a semiconductor structure

PVD apparatus and method with deposition chamber having multiple targets and magnets

Semiconductor processing tool

Semiconductor processing tool

Semiconductor processing tool

Method of using a polishing system

Mechanisms for forming semiconductor device having stable dislocation profile

Deflector for chamber cleaning

Semiconductor fabrication apparatus

Semiconductor fabrication apparatus

Atomic layer deposition method for manufacturing semiconductor structure

Semiconductor processing tool and methods of operation

Method for forming semiconductor device structure with etch stop layer

Method for forming semiconductor device structure with etch stop layer

Two-step shallow trench isolation (STI) process

Device and methods for chemical vapor deposition

CVD device pumping liner

Electrostatic chuck with multi-zone control

Seismic event displacement mitigation

AU OPTRONICS CORP

Display

Flexible device array substrate and manufacturing method of flexible device array substrate

Display

Display apparatus

TAIWAN SEMICONDUCTOR MFG

Post ECP multi-step anneal/H2 treatment to reduce film impurity

Post ECP multi-step anneal/H2 treatment to reduce film impurity

Two-step shallow trench isolation (STI) process

CHOU YOU-HUA

CVD conformal vacuum/pumping guiding design

Method and apparatus for preparing polysilazane on a semiconductor wafer

KAO CHUNG-EN

Electrostatic chuck robotic system

PVD apparatus and method with deposition chamber having multiple targets and magnets

NAT SCIENCE COUNCIL

Modified phenolic resin toughened by poly (alkylene oxide) and preparation thereof

CHOU YOU HUA

Semiconductor film formation apparatus and process

LEE CHIH TSUNG

Shower head apparatus and method for controlling plasma or gas distribution

AUO CORP

Spherical display device having through holes between pixel structures of a plurality of display units

CHEN CHIA-HO

Electrostatic chuck with multi-zone control

CHANG HUNG JUI

Integrated technology for partial air gap low K deposition

Hong min hao

Two-step shallow trench isolation (STI) process

KUO MING-SHIOU

Chemical vapor deposition film profile uniformity control

LIEN MING HUEI

UV curing system for semiconductors