Inventor
MAKAROV VLADIMIR V
US7 patents
⚠️ This page may combine multiple inventors who share the name “MAKAROV VLADIMIR V”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MAKAROV VLADIMIR V
4 patentsUS8481966B1Jul 9, 2013
Microplasma ion source for focused ion beam applications
MAKAROV VLADIMIR V3 citations58
US8277672B2Oct 2, 2012
Enhanced focused ion beam etching of dielectrics and silicon
MAKAROV VLADIMIR V5 citations58
US8894828B2Nov 25, 2014
FIB process for selective and clean etching of copper
MAKAROV VLADIMIR V0 citations48
US8674321B2Mar 18, 2014
Microplasma ion source for focused ion beam applications
MAKAROV VLADIMIR V1 citations48