Inventor

PETERSON MARIA

SE4 patents

⚠️ This page may combine multiple inventors who share the name “PETERSON MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EKC TECHNOLOGY INC

2 patents

US6638326B2Oct 28, 2003

Compositions for chemical mechanical planarization of tantalum and tantalum nitride

EKC TECHNOLOGY INC22 citations90

US6866792B2Mar 15, 2005

Compositions for chemical mechanical planarization of copper

EKC TECHNOLOGY INC15 citations82

PERSTORP AB

1 patent

US10815361B2Oct 27, 2020

Non-phthalic plasticiser

PERSTORP AB2 citations69

DANANOMATERIALS LLC

1 patent

US7033409B2Apr 25, 2006

Compositions for chemical mechanical planarization of tantalum and tantalum nitride

DANANOMATERIALS LLC1 citations43