Inventor
SHOJI MASAFUMI
JP2 patents
Patents
2 patentsUS11424143B2Aug 23, 2022
Heat insulation structure at lower end of vertical heat treatment apparatus and vertical heat treatment apparatus including heat insulation structure thereof
TOKYO ELECTRON LTD0 citations50
US9905442B2Feb 27, 2018
Heat treatment apparatus, heat treatment method, and program
TOKYO ELECTRON LTD0 citations36