Inventor
LACEY CHRISTOPHER
US4 patents
Patents
4 patentsUS5280340AJan 18, 1994
Method and apparatus to calibrate intensity and determine fringe order for interferometric measurement of small spacings
PHASE METRICS63 citations92
US5457534AOct 10, 1995
Method and apparatus to calibrate intensity and determine fringe order for interferometric measurement of small spacings
PHASE METRICS28 citations90
US5486924AJan 23, 1996
Method and apparatus for measurement of roughness and hardness of a surface
PHASE METRICS32 citations89
US5671048ASep 23, 1997
Method and apparatus for rotary load/unload slider positioning
PHASE METRICS8 citations70