Inventor

BRUSIC KAUFMAN VLASTA

US2 patents

Patents

2 patents

US6447371B2Sep 10, 2002

Chemical mechanical polishing slurry useful for copper/tantalum substrates

CABOT MICROELECTRONICS CORP58 citations94

US6589100B2Jul 8, 2003

Rare earth salt/oxidizer-based CMP method

CABOT MICROELECTRONICS CORP31 citations90