Inventor
MUDD PATTI J
US15 patents
⚠️ This page may combine multiple inventors who share the name “MUDD PATTI J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MUDD DANIEL T
5 patentsUS9188989B1Nov 17, 2015
Flow node to deliver process gas using a remote pressure measurement device
MUDD DANIEL T33 citations93
US8770215B1Jul 8, 2014
Low flow injector to deliver a low flow of gas to a remote location
MUDD DANIEL T18 citations82
US9976887B1May 22, 2018
Wider dynamic accuracy range for gas delivery devices
MUDD DANIEL T1 citations51
US9448564B2Sep 20, 2016
Gas delivery system for outputting fast square waves of process gas during semiconductor processing
MUDD DANIEL T1 citations51
US10497542B2Dec 3, 2019
Flow control showerhead with integrated flow restrictors for improved gas delivery to a semiconductor process
MUDD DANIEL T0 citations40
RENO TECH INC
5 patentsUS9958302B2May 1, 2018
Flow control system, method, and apparatus
RENO TECH INC14 citations92
US9690301B2Jun 27, 2017
Pressure based mass flow controller
RENO TECH INC20 citations92
US11003198B2May 11, 2021
Controlled delivery of process gas using a remote pressure measurement device
RENO TECH INC5 citations83
US10782165B2Sep 22, 2020
Flow control system, method, and apparatus
RENO TECH INC6 citations83
US10679880B2Jun 9, 2020
Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same
RENO TECH INC8 citations82
ICHOR SYSTEMS INC
5 patentsUS11144075B2Oct 12, 2021
Flow control system, method, and apparatus
ICHOR SYSTEMS INC5 citations81
US12228435B2Feb 18, 2025
Flow control system, method, and apparatus
ICHOR SYSTEMS INC0 citations62
US11815920B2Nov 14, 2023
Flow control system, method, and apparatus
ICHOR SYSTEMS INC0 citations60
US11424148B2Aug 23, 2022
Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same
ICHOR SYSTEMS INC0 citations60
US12411502B2Sep 9, 2025
Flow control system, method, and apparatus
ICHOR SYSTEMS INC0 citations58