Inventor
TSUBUSAKI KOJI
JP4 patents
Patents
4 patentsUS5887080AMar 23, 1999
Method and apparatus for processing pattern image data by SEM
TOSHIBA KK102 citations96
US6111981AAug 29, 2000
Method and apparatus for processing pattern image data by SEM
TOSHIBA KK29 citations91
US5555319ASep 10, 1996
Critical dimension measuring method and equipment thereof
TOSHIBA KK22 citations91
US5434409AJul 18, 1995
Critical dimension measuring method
TOSHIBA KK16 citations70