Inventor

SEHA THOMAS R

US2 patents

Patents

2 patents

US5607773AMar 4, 1997

Method of forming a multilevel dielectric

TEXAS INSTRUMENTS INC87 citations91

US5882981AMar 16, 1999

Mesa isolation Refill Process for Silicon on Insulator Technology Using Flowage Oxides as the Refill Material

TEXAS INSTRUMENTS INC49 citations90