Inventor

KOSHI YASUNOBU

JP9 patents

⚠️ This page may combine multiple inventors who share the name “KOSHI YASUNOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOKUSAI ELECTRIC CORP

5 patents

US12467689B2Nov 11, 2025

Furnace opening structure, substrate processing apparatus and method of manufacturing semiconductor device

KOKUSAI ELECTRIC CORP0 citations62

US12195848B2Jan 14, 2025

Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

KOKUSAI ELECTRIC CORP0 citations61

US11618947B2Apr 4, 2023

Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

KOKUSAI ELECTRIC CORP0 citations61

US12435439B2Oct 7, 2025

Substrate processing method, method of manufacturing semiconductor device, non-transitory computer-readable recording medium and substrate processing apparatus

KOKUSAI ELECTRIC CORP0 citations59

US12288683B2Apr 29, 2025

Method of manufacturing semiconductor device, substrate processing method, non-transitory computer-readable recording medium and substrate processing apparatus

KOKUSAI ELECTRIC CORP0 citations51

HITACHI INT ELECTRIC INC

3 patents

US9970112B2May 15, 2018

Substrate processing apparatus and method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC279 citations97

US8999858B2Apr 7, 2015

Substrate processing apparatus and method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC7 citations82

US9666430B2May 30, 2017

Method of manufacturing semiconductor device and substrate processing apparatus

HITACHI INT ELECTRIC INC1 citations50

MAEDA TAKAHIRO

1 patent

US8304328B2Nov 6, 2012

Manufacturing method of semiconductor device and substrate processing apparatus

MAEDA TAKAHIRO10 citations81