Inventor

OKAMIYA HIROKI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “OKAMIYA HIROKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

1 patent

US10163663B2Dec 25, 2018

Substrate processing apparatus, exhaust system and method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC5 citations70

KOKUSAI ELECTRIC CORP

1 patent

US11060190B2Jul 13, 2021

Substrate processing apparatus and control system

KOKUSAI ELECTRIC CORP0 citations41