Inventor
VILLETTO JR ROBERT T
US3 patents
Patents
3 patentsUS4589193AMay 20, 1986
Metal silicide channel stoppers for integrated circuits and method for making the same
IBM85 citations94
US4534826AAug 13, 1985
Trench etch process for dielectric isolation
IBM51 citations91
US4541168ASep 17, 1985
Method for making metal contact studs between first level metal and regions of a semiconductor device compatible with polyimide-filled deep trench isolation schemes
IBM32 citations88