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Inventor
BOBRZYNSKI BRIAN R
US
2 patents
Patents
2 patents
US7304490B2
Dec 4, 2007
In-situ wafer and probe desorption using closed loop heating
SOLID STATE MEASUREMENTS INC
1 citations
44
US7190186B2
Mar 13, 2007
Method and apparatus for determining concentration of defects and/or impurities in a semiconductor wafer
SOLID STATE MEASUREMENTS INC
1 citations
44