Inventor

RIGOUTAT OLIVIER

US2 patents

⚠️ This page may combine multiple inventors who share the name “RIGOUTAT OLIVIER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

1 patent

US8349202B2Jan 8, 2013

Methods for controlling bevel edge etching in a plasma chamber

LAM RES CORP5 citations71

FANG TONG

1 patent

US8083890B2Dec 27, 2011

Gas modulation to control edge exclusion in a bevel edge etching plasma chamber

FANG TONG6 citations71