Inventor

KIM JI-MYUNG

KR2 patents

⚠️ This page may combine multiple inventors who share the name “KIM JI-MYUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

1 patent

US9927720B2Mar 27, 2018

Substrate target for in-situ lithography metrology, metrology method for in-situ lithography, and method of manufacturing integrated circuit device by using in-situ metrology

SAMSUNG ELECTRONICS CO LTD2 citations68

KIM JI-MYUNG

1 patent

US9557655B2Jan 31, 2017

Photomask including focus metrology mark, substrate target including focus monitor pattern, metrology method for lithography process, and method of manufacturing integrated circuit device

KIM JI-MYUNG6 citations65