Inventor
SRIDHAR UPPILI
SG37 patents
⚠️ This page may combine multiple inventors who share the name “SRIDHAR UPPILI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INST OF MICROELECTRONICS
16 patentsUS6762049B2Jul 13, 2004
Miniaturized multi-chamber thermal cycler for independent thermal multiplexing
INST OF MICROELECTRONICS117 citations98
US6509186B1Jan 21, 2003
Miniaturized thermal cycler
INST OF MICROELECTRONICS117 citations96
US6461888B1Oct 8, 2002
Lateral polysilicon beam process
INST OF MICROELECTRONICS70 citations95
US6432695B1Aug 13, 2002
Miniaturized thermal cycler
INST OF MICROELECTRONICS60 citations95
US6503847B2Jan 7, 2003
Room temperature wafer-to-wafer bonding by polydimethylsiloxane
INST OF MICROELECTRONICS26 citations92
US6495903B2Dec 17, 2002
Integrated circuit inductor
INST OF MICROELECTRONICS25 citations92
US6521447B2Feb 18, 2003
Miniaturized thermal cycler
INST OF MICROELECTRONICS26 citations91
US6573154B1Jun 3, 2003
High aspect ratio trench isolation process for surface micromachined sensors and actuators
INST OF MICROELECTRONICS35 citations90
US6662654B2Dec 16, 2003
Z-axis accelerometer
INST OF MICROELECTRONICS21 citations89
US6571628B1Jun 3, 2003
Z-axis accelerometer
INST OF MICROELECTRONICS17 citations89
US6293148B1Sep 25, 2001
Structural design for improving the sensitivity of a surface-micromachined vibratory gyroscope
INST OF MICROELECTRONICS35 citations87
US6263740B1Jul 24, 2001
CMOS compatible integrated pressure sensor
INST OF MICROELECTRONICS26 citations85
US5930595AJul 27, 1999
Isolation process for surface micromachined sensors and actuators
INST OF MICROELECTRONICS37 citations83
US6908825B2Jun 21, 2005
Method of making an integrated circuit inductor wherein a plurality of apertures are formed beneath an inductive loop
INST OF MICROELECTRONICS8 citations73
US6483223B2Nov 19, 2002
Method to prevent charging effects in electrostatic devices
INST OF MICROELECTRONICS11 citations65
US6858459B2Feb 22, 2005
Method of fabricating micro-mirror switching device
INST OF MICROELECTRONICS3 citations63
MAXIM INTEGRATED PRODUCTS
7 patentsUS7463125B2Dec 9, 2008
Microrelays and microrelay fabrication and operating methods
MAXIM INTEGRATED PRODUCTS22 citations93
US7393758B2Jul 1, 2008
Wafer level packaging process
MAXIM INTEGRATED PRODUCTS49 citations93
US6841839B2Jan 11, 2005
Microrelays and microrelay fabrication and operating methods
MAXIM INTEGRATED PRODUCTS45 citations93
US6621135B1Sep 16, 2003
Microrelays and microrelay fabrication and operating methods
MAXIM INTEGRATED PRODUCTS20 citations93
US9184113B1Nov 10, 2015
Methods of forming coaxial feedthroughs for 3D integrated circuits
MAXIM INTEGRATED PRODUCTS2 citations63
US9331048B2May 3, 2016
Bonded stacked wafers and methods of electroplating bonded stacked wafers
MAXIM INTEGRATED PRODUCTS1 citations51
US10475559B1Nov 12, 2019
Controlling the morphology in metal loaded paste material
MAXIM INTEGRATED PRODUCTS0 citations45