Inventor
LOPATA ALEXANDER D
US3 patents
Patents
3 patentsUS4707218ANov 17, 1987
Lithographic image size reduction
IBM220 citations96
US4871630AOct 3, 1989
Mask using lithographic image size reduction
IBM68 citations93
US4474864AOct 2, 1984
Method for dose calculation of photolithography projection printers through bleaching of photo-active compound in a photoresist
IBM16 citations71