Inventor

HEAD BRIAN

US2 patents

⚠️ This page may combine multiple inventors who share the name “HEAD BRIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

RATHSACK BENJAMEN M

1 patent

US8288174B1Oct 16, 2012

Electrostatic post exposure bake apparatus and method

RATHSACK BENJAMEN M13 citations80

TOKYO ELECTRON LTD

1 patent

US7665917B2Feb 23, 2010

Heat treatment apparatus and methods for thermally processing a substrate using a pressurized gaseous environment

TOKYO ELECTRON LTD6 citations54