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Inventor
KIM ERIK
US
2 patents
Patents
2 patents
US10244613B2
Mar 26, 2019
System and method for electrodeless plasma ignition in laser-sustained plasma light source
KLA TENCOR CORP
5 citations
71
US9534848B2
Jan 3, 2017
Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures
KLA TENCOR CORP
1 citations
48