Inventor
SANO MASAKAZU
JP12 patents
⚠️ This page may combine multiple inventors who share the name “SANO MASAKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
3 patentsSUMITOMO SITIX CORP
2 patentsUS5508207AApr 16, 1996
Method of annealing a semiconductor wafer in a hydrogen atmosphere to desorb surface contaminants
SUMITOMO SITIX CORP69 citations94
US5931662AAug 3, 1999
Silicon single crystal wafer annealing method and equipment and silicon single crystal wafer and manufacturing method related thereto
SUMITOMO SITIX CORP43 citations93
SUMITOMO METAL IND
2 patentsUS6129787AOct 10, 2000
Semiconductor silicon wafer, semiconductor silicon wafer fabrication method and annealing equipment
SUMITOMO METAL IND45 citations92
US6074479AJun 13, 2000
Silicon single crystal wafer annealing method and equipment, and silicon single crystal wafer and manufacturing method related thereto
SUMITOMO METAL IND24 citations90