Inventor
FRANZEN PAUL
DE12 patents
⚠️ This page may combine multiple inventors who share the name “FRANZEN PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
4 patentsUS7115017B1Oct 3, 2006
Methods for controlling the pressures of adjustable pressure zones of a work piece carrier during chemical mechanical planarization
NOVELLUS SYSTEMS INC272 citations95
US7264537B1Sep 4, 2007
Methods for monitoring a chemical mechanical planarization process of a metal layer using an in-situ eddy current measuring system
NOVELLUS SYSTEMS INC19 citations90
US7811153B1Oct 12, 2010
High throughput servo load cup with integrated wet chemistry delivery
NOVELLUS SYSTEMS INC11 citations79
US7428470B2Sep 23, 2008
Method for monitoring edge exclusion during chemical mechanical planarization
NOVELLUS SYSTEMS INC0 citations51
BUCKAU WOLF MASCHF R
3 patentsUS4379734AApr 12, 1983
Multistage evaporator
BUCKAU WOLF MASCHF R39 citations91
US4343678AAug 10, 1982
Multi-stage evaporating apparatus with integrated heat regenerating system
BUCKAU WOLF MASCHF R10 citations72
US4403480ASep 13, 1983
Method of and apparatus for recovering heat energy contained in vapors of multi-stage evaporators installed for thermal material-separating processes
BUCKAU WOLF MASCHF R6 citations61