Inventor
ABE HARUHIKO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “ABE HARUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
6 patentsUS4438368AMar 20, 1984
Plasma treating apparatus
MITSUBISHI ELECTRIC CORP88 citations95
US4341616AJul 27, 1982
Dry etching device
MITSUBISHI ELECTRIC CORP20 citations81
US4333226AJun 8, 1982
Method of forming patterned refractory metal films by selective oxygen implant and sublimation
MITSUBISHI ELECTRIC CORP24 citations80
US4314874AFeb 9, 1982
Method for forming a fine pattern of an aluminum film
MITSUBISHI ELECTRIC CORP28 citations79
US4454166AJun 12, 1984
Process for preparing semiconductor device
MITSUBISHI ELECTRIC CORP8 citations72
US4377734AMar 22, 1983
Method for forming patterns by plasma etching
MITSUBISHI ELECTRIC CORP14 citations70