Inventor
ROKNI SHAHRYAR
US7 patents
Patents
7 patentsUS6757316B2Jun 29, 2004
Four KHz gas discharge laser
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US6028880AFeb 22, 2000
Automatic fluorine control system
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US5978406ANov 2, 1999
Fluorine control system for excimer lasers
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US6704339B2Mar 9, 2004
Lithography laser with beam delivery and beam pointing control
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US6882674B2Apr 19, 2005
Four KHz gas discharge laser system
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US6504860B2Jan 7, 2003
Purge monitoring system for gas discharge laser
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US6539042B2Mar 25, 2003
Ultra pure component purge system for gas discharge laser
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