Inventor
PAN XIAOJIANG J
US7 patents
Patents
7 patentsUS6567450B2May 20, 2003
Very narrow band, two chamber, high rep rate gas discharge laser system
CYMER INC265 citations99
US6757316B2Jun 29, 2004
Four KHz gas discharge laser
CYMER INC97 citations97
US6529321B2Mar 4, 2003
Protective overcoat for replicated diffraction gratings
CYMER INC19 citations92
US6109574AAug 29, 2000
Gas laser chamber/optics support structure
CYMER INC48 citations89
US6511703B2Jan 28, 2003
Protective overcoat for replicated diffraction gratings
CYMER INC14 citations84
US6466601B1Oct 15, 2002
Beam seal for line narrowed production laser
CYMER INC6 citations59
US6539042B2Mar 25, 2003
Ultra pure component purge system for gas discharge laser
CYMER INC0 citations51