Inventor
INUSHIMA TAKASHI
JP39 patents
⚠️ This page may combine multiple inventors who share the name “INUSHIMA TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMICONDUCTOR ENERGY LAB
37 patentsUS6261877B1Jul 17, 2001
Method of manufacturing gate insulated field effect transistors
SEMICONDUCTOR ENERGY LAB90 citations99
US6177302B1Jan 23, 2001
Method of manufacturing a thin film transistor using multiple sputtering chambers
SEMICONDUCTOR ENERGY LAB235 citations99
US5427824AJun 27, 1995
CVD apparatus
SEMICONDUCTOR ENERGY LAB352 citations99
US5039548AAug 13, 1991
Plasma chemical vapor reaction method employing cyclotron resonance
SEMICONDUCTOR ENERGY LAB77 citations96
US4730903AMar 15, 1988
Ferroelectric crystal display panel and manufacturing method thereof
SEMICONDUCTOR ENERGY LAB59 citations96
US6550325B1Apr 22, 2003
Electric device and method of driving the same
SEMICONDUCTOR ENERGY LAB54 citations94
US6566175B2May 20, 2003
Method of manufacturing gate insulated field effect transistors
SEMICONDUCTOR ENERGY LAB22 citations93
US5622607AApr 22, 1997
Method of forming an oxide insulating film
SEMICONDUCTOR ENERGY LAB36 citations93
US5320984AJun 14, 1994
Method for forming a semiconductor film by sputter deposition in a hydrogen atmosphere
SEMICONDUCTOR ENERGY LAB30 citations93
US4828967AMay 9, 1989
Electronic device and its manufacturing method
SEMICONDUCTOR ENERGY LAB27 citations93
US4723508AFeb 9, 1988
Plasma CVD apparatus
SEMICONDUCTOR ENERGY LAB25 citations93
US6013338AJan 11, 2000
CVD apparatus
SEMICONDUCTOR ENERGY LAB18 citations92
US5855970AJan 5, 1999
Method of forming a film on a substrate
SEMICONDUCTOR ENERGY LAB21 citations92
US5629245AMay 13, 1997
Method for forming a multi-layer planarization structure
SEMICONDUCTOR ENERGY LAB19 citations92
US5283087AFeb 1, 1994
Plasma processing method and apparatus
SEMICONDUCTOR ENERGY LAB25 citations92
US4987004AJan 22, 1991
Plasma processing method and apparatus
SEMICONDUCTOR ENERGY LAB22 citations92
US4971667ANov 20, 1990
Plasma processing method and apparatus
SEMICONDUCTOR ENERGY LAB52 citations92
US7507615B2Mar 24, 2009
Method of manufacturing gate insulated field effect transistors
SEMICONDUCTOR ENERGY LAB8 citations84
US5610405AMar 11, 1997
Electronic device for measuring light properties
SEMICONDUCTOR ENERGY LAB17 citations82
US5608666AMar 4, 1997
Optical memory apparatus using first and second illuminating lights for writing and reading
SEMICONDUCTOR ENERGY LAB15 citations82
US4820612AApr 11, 1989
Electronic device and its manufacturing method
SEMICONDUCTOR ENERGY LAB17 citations82
US4780794AOct 25, 1988
Electronic device
SEMICONDUCTOR ENERGY LAB22 citations82
US6520189B1Feb 18, 2003
CVD apparatus
SEMICONDUCTOR ENERGY LAB8 citations74
US5406081AApr 11, 1995
Infrared detector utilizing diamond film
SEMICONDUCTOR ENERGY LAB12 citations74
US5298749AMar 29, 1994
Infrared detector utilizing diamond film
SEMICONDUCTOR ENERGY LAB12 citations74
US5043567AAug 27, 1991
Image sensor and manufacturing method for the same
SEMICONDUCTOR ENERGY LAB7 citations74
US5017502AMay 21, 1991
Image sensor and manufacturing method for the same
SEMICONDUCTOR ENERGY LAB6 citations74
US5007374AApr 16, 1991
Apparatus for forming thin films in quantity
SEMICONDUCTOR ENERGY LAB10 citations74
US4943710AJul 24, 1990
Image sensor and manufacturing method for the same
SEMICONDUCTOR ENERGY LAB10 citations74
US5717215AFeb 10, 1998
Electronic device for reading information stored in a substance
SEMICONDUCTOR ENERGY LAB7 citations73
US5670777ASep 23, 1997
Photosensitive device and two frequency driving method thereof
SEMICONDUCTOR ENERGY LAB12 citations73
US5622586AApr 22, 1997
Method of fabricating device made of thin diamond foil
SEMICONDUCTOR ENERGY LAB17 citations73
US5256483AOct 26, 1993
Plasma processing method and apparatus
SEMICONDUCTOR ENERGY LAB15 citations73
US4855805AAug 8, 1989
Nonlinear semiconductor element, liquid crystal display panel using the same and their manufacturing methods
SEMICONDUCTOR ENERGY LAB5 citations63
US4844588AJul 4, 1989
Liquid crystal display panel and manufacturing method thereof
SEMICONDUCTOR ENERGY LAB3 citations63
US4744862AMay 17, 1988
Manufacturing methods for nonlinear semiconductor element and liquid crystal display panel using the same
SEMICONDUCTOR ENERGY LAB3 citations63
US5469424ANov 21, 1995
Electronic device utilizing a material capable of storing information which is readable by illumination
SEMICONDUCTOR ENERGY LAB4 citations62