Inventor
OKADA OSAMI
JP13 patents
Patents
13 patentsUS4579623AApr 1, 1986
Method and apparatus for surface treatment by plasma
HITACHI LTD654 citations99
US4901667AFeb 20, 1990
Surface treatment apparatus
HITACHI LTD103 citations96
US4543465ASep 24, 1985
Microwave plasma source having improved switching operation from plasma ignition phase to normal ion extraction phase
HITACHI LTD108 citations95
US5108543AApr 28, 1992
Method of surface treatment
HITACHI LTD36 citations92
US4801847AJan 31, 1989
Charged particle accelerator using quadrupole electrodes
HITACHI LTD26 citations92
US4769540ASep 6, 1988
Atmospheric pressure ionization mass spectrometer
HITACHI LTD25 citations92
US4735777AApr 5, 1988
Instrument for parallel analysis of metabolites in human urine and expired air
HITACHI LTD51 citations92
US4658143AApr 14, 1987
Ion source
HITACHI LTD29 citations92
US4633138ADec 30, 1986
Ion implanter
HITACHI LTD43 citations92
US4433228AFeb 21, 1984
Microwave plasma source
HITACHI LTD43 citations92
US4863671ASep 5, 1989
Plasma confinement system
HITACHI LTD23 citations81
USRE35681EDec 2, 1997
Atmospheric pressure ionization mass spectrometer
HITACHI LTD3 citations63
US4629930ADec 16, 1986
Plasma ion source
HITACHI LTD4 citations60