Inventor

TOM GLENN M

US88 patents

⚠️ This page may combine multiple inventors who share the name “TOM GLENN M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOM GLENN M

ADVANCED TECH MATERIALS

Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same

Fluid storage and dispensing system

Fluid storage and dispensing system

Gas source and dispensing system

Storage and delivery system for gaseous compounds

Fluid storage and delivery system utilizing carbon sorbent medium

Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds

Sorbent-based gas storage and delivery system

Non-plasma in-situ cleaning of processing chambers using static flow methods

Gas cabinet assembly comprising sorbent-based gas storage and delivery system

Gas storage and dispensing system comprising regulator interiorly disposed in fluid containment vessel and adjustable in situ therein

Piezoelectric quartz crystal hydrogen sensor, and hydrogen sensing method utilizing same

Sorbent-based fluid storage and dispensing vessel with enhanced heat transfer means

Process system with integrated gas storage and delivery unit

Fluid storage and delivery system comprising high work capacity physical sorbent

Quartz crystal microbalance sensors and semiconductor manufacturing process systems comprising same

Quartz crystal microbalance system for detecting concentration of a selected gas component in a multicomponent gas stream

Gas source and dispensing system with in situ monitoring of pressure and temperature

Composition, apparatus, and process, for sorption of gaseous compounds of group II-VII elements

Process and composition for drying of gaseous hydrogen halides

Process and composition for purifying arsine, phosphine, ammonia, and inert gases to remove Lewis acid and oxidant impurities therefrom

Valve block and container for semiconductor source reagent dispensing and/or purification

Valve block and container for semiconductor source reagent dispensing and/or purification

Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensing

Piezoelectric gas sensing device for detection of a gas species a gaseous environment

Piezoelectric sensor for hydride gases, and fluid monitoring apparatus comprising same

Treatment of supercritical fluid utilized in semiconductor manufacturing applications

Gas cabinet assembly comprising sorbent-based gas storage and delivery system

Apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing sorbent-based fluid storage and dispensing system for reagent delivery

Laser system utilizing sorbent-based gas storage and delivery system

Low concentration gas delivery system utilizing sorbent-based gas storage and delivery system

Fluid storage and dispensing vessel with modified high surface area solid as fluid storage medium

Sorbent-based fluid storage and dispensing system with high efficiency sorbent medium

High capacity gas storage and dispensing system

High capacity gas storage and dispensing system

Apparatus, process, and composition for in-situ generation of polyhydridic compounds of group iv-vi elements

Process, composition, and apparatus for purifying inert gases to remove Lewis acid and oxidant impurities therefrom

Process and composition for drying of gaseous hydrogen halides

ATMI ECOSYS CORP

Point-of-use catalytic oxidation apparatus and method for treatment of voc-containing gas streams

Method for concentration and recovery of halocarbons from effluent gas streams

Process for removing and recovering halocarbons from effluent process streams

Method and apparatus for concentration and recovery of halocarbons from effluent gas streams

NOVAPURE CORP

Bulk gas sorption and apparatus, gas containment/treatment system comprising same, and sorbent composition therefor

Process and composition for purifying semiconductor process gases to remove Lewis acid and oxidant impurities therefrom

In-line detector system for real-time determination of impurity concentration in a flowing gas stream

In-line detector system for real-time determination of impurity concentration in a flowing gas stream

HERCULES INC

Dicyclopentadiene polymer product

Macroreticulate polymer scavengers for the removal of impurities from inert fluids

MILLIPORE INVEST HOLDINGS

Differential gas sensing in-line monitoring system

Process for purifying semiconductor process gases to remove lewis acid and oxidant impurities therefrom