Inventor
LIN JEN-TSUNG
TW7 patents
⚠️ This page may combine multiple inventors who share the name “LIN JEN-TSUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNITED MICROELECTRONICS CORP
3 patentsUS5882947AMar 16, 1999
Method for probing the error of energy and dosage in the high-energy ion implantation
UNITED MICROELECTRONICS CORP13 citations73
US6014223AJan 11, 2000
Method of determining the impurity concentration of impurity-doped polysilicon in semiconductor wafers
UNITED MICROELECTRONICS CORP4 citations57
US7358197B2Apr 15, 2008
Method for avoiding polysilicon film over etch abnormal
UNITED MICROELECTRONICS CORP2 citations51