Inventor
MA HUNG-LUNG
TW5 patents
Patents
5 patentsUS6177874B1Jan 23, 2001
Liquid supplying device for providing chemical solution with a liquid level sensor
UNITED MICROELECTRONICS CORP7 citations69
US5937876AAug 17, 1999
Rinsing system used in a photoresist coater with capability to avoid a reversed pressure effect
UNITED MICROELECTRONICS CORP2 citations57
US6012607AJan 11, 2000
Dispense system of a photoresist coating machine
UNITED MICROELECTRONICS CORP6 citations54
US6015096AJan 18, 2000
Speed controller with scales
UNITED MICROELECTRONICS CORP0 citations50
US6076569AJun 20, 2000
Cup rinse with a valvular ring
UNITED MICROELECTRONICS CORP0 citations49