Inventor
LAI KUEI-HSI
TW5 patents
Patents
5 patentsUS6099646AAug 8, 2000
Dispensing system of a coater
UNITED MICROELECTRONICS CORP6 citations60
US6334581B1Jan 1, 2002
Nozzle reposition device used in a resist coating process
UNITED MICROELECTRONICS CORP2 citations57
US6170512B1Jan 9, 2001
Flow control device
UNITED MICROELECTRONICS CORP5 citations57
US5937876AAug 17, 1999
Rinsing system used in a photoresist coater with capability to avoid a reversed pressure effect
UNITED MICROELECTRONICS CORP2 citations57
US6076569AJun 20, 2000
Cup rinse with a valvular ring
UNITED MICROELECTRONICS CORP0 citations49