Inventor
ALLADA SUDHAKAR
US2 patents
Patents
2 patentsUS6218317B1Apr 17, 2001
Methylated oxide-type dielectric as a replacement for SiO2 hardmasks used in polymeric low K, dual damascene interconnect integration
NAT SEMICONDUCTOR CORP26 citations87
US6440853B2Aug 27, 2002
Methylated oxide-type dielectric as a replacement for SiO2 hardmasks used in polymeric low k, dual damascene interconnect integration
NAT SEMICONDUCTOR CORP2 citations57