Inventor
VUGTS JOSEPHUS CORNELIUS JOHAN
NL3 patents
Patents
3 patentsUS7359031B2Apr 15, 2008
Lithographic projection assembly, load lock and method for transferring objects
ASML NETHERLANDS BV12 citations80
US7394520B2Jul 1, 2008
Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lock
ASML NETHERLANDS BV10 citations79
US7576831B2Aug 18, 2009
Method and apparatus for maintaining a machine part
ASML NETHERLANDS BV2 citations58