Inventor
FRANSSEN JOHANNES HENDRIKUS GE
NL5 patents
Patents
5 patentsUS7359031B2Apr 15, 2008
Lithographic projection assembly, load lock and method for transferring objects
ASML NETHERLANDS BV12 citations80
US7394520B2Jul 1, 2008
Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lock
ASML NETHERLANDS BV10 citations79
US7349082B2Mar 25, 2008
Particle detection device, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations61
US7384228B2Jun 10, 2008
Insertion device, lithographic apparatus with said insertion device and device manufacturing method
ASML NETHERLANDS BV4 citations58
US7283225B2Oct 16, 2007
Particle detection device, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations57