Inventor

KITADA HIROHO

JP5 patents

⚠️ This page may combine multiple inventors who share the name “KITADA HIROHO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OHASHI TOMOHIRO

2 patents

US8897906B2Nov 25, 2014

Wafer processing based on sensor detection and system learning

OHASHI TOMOHIRO8 citations81

US8569177B2Oct 29, 2013

Plasma processing apparatus and plasma processing method

OHASHI TOMOHIRO3 citations60

KITADA HIROHO

1 patent

US8828257B2Sep 9, 2014

Plasma processing apparatus and operation method thereof

KITADA HIROHO6 citations65

TOCALO CO LTD

1 patent

US11955360B2Apr 9, 2024

Electrostatic chuck and processing apparatus

TOCALO CO LTD0 citations54

HITACHI HIGH TECH CORP

1 patent

US11482435B2Oct 25, 2022

Plasma processing apparatus

HITACHI HIGH TECH CORP0 citations47