Inventor

KUSUMOTO SHIROU

JP3 patents

Patents

3 patents

US6465150B1Oct 15, 2002

Radiation-sensitive resin composition

JSR CORP20 citations90

US6468714B2Oct 22, 2002

Negative radiation-sensitive resin composition

JSR CORP14 citations82

US6846607B2Jan 25, 2005

Carbazole derivative and chemically amplified radiation-sensitive resin composition

JSR CORP2 citations61