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Inventor
CARSON STEVEN L
US
2 patents
Patents
2 patents
US6772612B2
Aug 10, 2004
Door-in-door front opening unified pod
INTEL CORP
7 citations
64
US7761179B2
Jul 20, 2010
Method for consistent updates to automated process control (APC) models with partitioning along multiple components
INTEL CORP
3 citations
57