Inventor
NICKHOU AFSHIN
US3 patents
Patents
3 patentsUS7234477B2Jun 26, 2007
Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces
LAM RES CORP55 citations95
US6866051B1Mar 15, 2005
Megasonic substrate processing module
LAM RES CORP15 citations82
US6851436B1Feb 8, 2005
Substrate processing using a fluid re-circulation system in a wafer scrubbing system
LAM RES CORP5 citations61