Inventor
OIZUMI HIROAKI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “OIZUMI HIROAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
8 patentsUS5485497AJan 16, 1996
Optical element and projection exposure apparatus employing the same
HITACHI LTD25 citations92
US5372916ADec 13, 1994
X-ray exposure method with an X-ray mask comprising phase shifter sidewalls
HITACHI LTD44 citations92
US5305364AApr 19, 1994
Projection type X-ray lithography apparatus
HITACHI LTD38 citations92
US5272744ADec 21, 1993
Reflection mask
HITACHI LTD33 citations92
US5017458AMay 21, 1991
Method for production of graft copolymer, pattern replication method, and base polymer and resist for graft copolymerization
HITACHI LTD13 citations72
US4960676AOct 2, 1990
Method for forming pattern by using graft copolymerization
HITACHI LTD7 citations72
US4954424ASep 4, 1990
Pattern fabrication by radiation-induced graft copolymerization
HITACHI LTD4 citations62
US5177773AJan 5, 1993
X-ray mask and method for producing same
HITACHI LTD2 citations61