Inventor
MIAO BRUCE
US3 patents
Patents
3 patentsUS9824934B1Nov 21, 2017
Shallow trench isolation recess process flow for vertical field effect transistor fabrication
IBM7 citations82
US10388651B2Aug 20, 2019
Shallow trench isolation recess process flow for vertical field effect transistor fabrication
IBM0 citations50
US9985021B2May 29, 2018
Shallow trench isolation recess process flow for vertical field effect transistor fabrication
IBM1 citations50