Inventor

MAHONEY LEONARD J

US8 patents

⚠️ This page may combine multiple inventors who share the name “MAHONEY LEONARD J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ADVANCED ENERGY IND INC

3 patents

US6432260B1Aug 13, 2002

Inductively coupled ring-plasma source apparatus for processing gases and materials and method thereof

ADVANCED ENERGY IND INC160 citations98

US6902646B2Jun 7, 2005

Sensor array for measuring plasma characteristics in plasma processing environments

ADVANCED ENERGY IND INC170 citations96

US6830650B2Dec 14, 2004

Wafer probe for measuring plasma and surface characteristics in plasma processing environments

ADVANCED ENERGY IND INC107 citations96

WISCONSIN ALUMNI RES FOUND

1 patent

US5521351AMay 28, 1996

Method and apparatus for plasma surface treatment of the interior of hollow forms

WISCONSIN ALUMNI RES FOUND162 citations97

ADVANCED PLASMA INC

1 patent

US7192505B2Mar 20, 2007

Wafer probe for measuring plasma and surface characteristics in plasma processing environments

ADVANCED PLASMA INC51 citations91

MASSACHUSETTS INST TECHNOLOGY

1 patent

US5411914AMay 2, 1995

III-V based integrated circuits having low temperature growth buffer or passivation layers

MASSACHUSETTS INST TECHNOLOGY31 citations90

MAHONEY LEONARD J

1 patent

US8545669B2Oct 1, 2013

Sensor array for measuring plasma characteristics in plasma processing environments

MAHONEY LEONARD J24 citations87

VEECO INSTR INC

1 patent

US7853364B2Dec 14, 2010

Adaptive controller for ion source

VEECO INSTR INC12 citations74