Inventor

YE RUBIN

CN4 patents

⚠️ This page may combine multiple inventors who share the name “YE RUBIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA

3 patents

US11626314B2Apr 11, 2023

Lift pin assembly, an electrostatic chuck and a processing apparatus where the electrostatic chuck is located

ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA1 citations56

US12087548B2Sep 10, 2024

Plasma reactor

ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations44

US12494350B2Dec 9, 2025

Lower electrode assembly and plasma processing device

ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations43

ADVANCED MICRO FABRICATION EQUIPMENT INC SHANGHAI

1 patent

US10593520B2Mar 17, 2020

Temperature adjusting apparatus and method for a focus ring

ADVANCED MICRO FABRICATION EQUIPMENT INC SHANGHAI5 citations70