Inventor
MADER BJOERN
DE3 patents
Patents
3 patentsUS7365350B2Apr 29, 2008
Method and arrangement for the suppression of debris in the generation of short-wavelength radiation based on a plasma
XTREME TECH GMBH23 citations87
US7750327B2Jul 6, 2010
Device for the generation of a gas curtain for plasma-based EUV radiation sources
XTREME TECH GMBH7 citations66
US7755070B2Jul 13, 2010
Arrangement for the suppression of unwanted spectral components in a plasma-based EUV radiation source
XTREME TECH GMBH3 citations57