Inventor
DE BRUIJN RENE
DE2 patents
Patents
2 patentsUS7365350B2Apr 29, 2008
Method and arrangement for the suppression of debris in the generation of short-wavelength radiation based on a plasma
XTREME TECH GMBH23 citations87
US7755070B2Jul 13, 2010
Arrangement for the suppression of unwanted spectral components in a plasma-based EUV radiation source
XTREME TECH GMBH3 citations57