Inventor

HAGIRI MASATO

JP2 patents

⚠️ This page may combine multiple inventors who share the name “HAGIRI MASATO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON KK

1 patent

US10539879B2Jan 21, 2020

Optical apparatus, exposure apparatus, method of manufacturing optical apparatus, and method of manufacturing article

CANON KK0 citations42

WATANABE SHU

1 patent

US8319948B2Nov 27, 2012

Evaluation method and exposure apparatus

WATANABE SHU0 citations25