Inventor

LIAO FEIHONG

CN2 patents

⚠️ This page may combine multiple inventors who share the name “LIAO FEIHONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD

1 patent

US10345720B2Jul 9, 2019

Photolithography tool and method for compensating for surface deformation in carrier of photolithography tool

SHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD0 citations38

SHANGHAI MICROELECTRONICS EQUI

1 patent

US9760022B2Sep 12, 2017

Lithography machine workpiece table and vertical position initialization method thereof

SHANGHAI MICROELECTRONICS EQUI0 citations29